Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.
| 000 | 01160camuuu200301 a 4500 | |
| 001 | 000000606631 | |
| 003 | OCoLC | |
| 005 | 19981021163313.0 | |
| 008 | 970708s1997 paua b 101 0 eng | |
| 010 | ▼a 97028526 | |
| 020 | ▼a 1558993819 | |
| 040 | ▼a DLC ▼c DLC | |
| 049 | ▼l 121035225 ▼f 과학 | |
| 050 | 0 0 | ▼a TK7871.85 ▼b .S396 1997 |
| 082 | 0 0 | ▼a 621.3815/2 ▼2 21 |
| 090 | ▼a 621.38152 ▼b S416 | |
| 245 | 0 0 | ▼a Science and technology of semiconductor surface preparation : ▼b symposium held April 1-3, 1997, San Francisco, California, U.S.A. / ▼c editors, Gregg S. Higashi ... [et al.]. |
| 260 | ▼a Pittsburgh, Pa. : ▼b Materials Research Society, ▼c c1997. | |
| 300 | ▼a xiii, 545 p. : ▼b ill. ; ▼c 24 cm. | |
| 490 | 1 | ▼a Materials Research Society symposium proceedings, ▼x 0272-9172 ; ▼v v. 477. |
| 504 | ▼a Includes bibliographical references and indexes. | |
| 650 | 0 | ▼a Semiconductors ▼x Surfaces ▼x Congresses. |
| 650 | 0 | ▼a Surface preparation ▼x Congresses. |
| 650 | 0 | ▼a Semiconductors ▼x Cleaning ▼x Congresses. |
| 650 | 0 | ▼a Surface chemistry ▼x Congresses. |
| 700 | 1 | ▼a Higashi, Gregg S. |
| 830 | 0 | ▼a Materials Research Society symposia proceedings ; ▼v v. 477. |
소장정보
| No. | 소장처 | 청구기호 | 등록번호 | 도서상태 | 반납예정일 | 예약 | 서비스 |
|---|---|---|---|---|---|---|---|
| No. 1 | 소장처 과학도서관/Sci-Info(2층서고)/ | 청구기호 621.38152 S416 | 등록번호 121035225 (4회 대출) | 도서상태 대출가능 | 반납예정일 | 예약 | 서비스 |