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Advances in plasma-grown hydrogenated films

Advances in plasma-grown hydrogenated films (1회 대출)

자료유형
단행본
개인저자
Francombe, Maurice H.
서명 / 저자사항
Advances in plasma-grown hydrogenated films / edited by Maurice H. Francombe.
발행사항
San Diego :   Academic Press,   c2002.  
형태사항
x, 280 p. : ill. ; 24 cm.
총서사항
Thin films and nanostructures, 1079-4050 ; v. 30
ISBN
0125330308
서지주기
Includes bibliographical references and index.
일반주제명
Semiconductors -- Plasma effects. Semiconductor films. Amorphous semiconductors.
000 00903namuu2200253 a 4500
001 000000820937
005 20030708110611
008 020111s2002 caua b 001 0 eng d
020 ▼a 0125330308
040 ▼a FHM ▼c FHM ▼d 211009
049 ▼a KUBA ▼l 121080244 ▼f 과학
082 0 4 ▼a 621.38152 ▼2 21
090 ▼a 621.38152 ▼b A2442
245 0 0 ▼a Advances in plasma-grown hydrogenated films / ▼c edited by Maurice H. Francombe.
246 3 0 ▼a Advances in plasma grown hydrogenated films
260 ▼a San Diego : ▼b Academic Press, ▼c c2002.
300 ▼a x, 280 p. : ▼b ill. ; ▼c 24 cm.
440 0 ▼a Thin films and nanostructures, ▼x 1079-4050 ; ▼v v. 30
504 ▼a Includes bibliographical references and index.
650 0 ▼a Semiconductors ▼x Plasma effects.
650 0 ▼a Semiconductor films.
650 0 ▼a Amorphous semiconductors.
700 1 ▼a Francombe, Maurice H.

소장정보

No. 소장처 청구기호 등록번호 도서상태 반납예정일 예약 서비스
No. 1 소장처 과학도서관/Sci-Info(2층서고)/ 청구기호 621.38152 A2442 등록번호 121080244 (1회 대출) 도서상태 대출가능 반납예정일 예약 서비스 B M

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책소개

Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical and their technological aspects.

Starting with Volume 30, the title of the series, Thin Films, is being changed to Thin Films and Nanostructures. We feel that this new title
reflects more accurately the rapidly growing inclusion of research and
development efforts on nanostructures, especially in relation to novel
solid-state device formats



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