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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. (Loan 8 times)

Material type

단행본

Personal Author

Osgood, R. M. Brueck, S. R. J. Schlossberg, H. R.

Corporate Author

United States. Air Force. Office of Scientific Research.

Title Statement

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

Publication, Distribution, etc

New York : North-Holland, c1983.

Physical Medium

xiii, 298 p. : ill. ; 24 cm.

Series Statement

Materials Research Society symposia proceedings ;v. 17.

ISBN

0444007822 :

General Note

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.

Bibliography, Etc. Note

Includes bibliographical references and indexes.

Subject Added Entry-Topical Term

Lasers --Industrial applications --Congresses. Semiconductors --Congresses.

비통제주제어

Semiconductor devices, Production, Use of lasers,,

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008		830408s1983 nyua b 101 0 eng
010		▼a 83008028
015		▼a GB84-7368
020		▼a 0444007822 : ▼c $73.00
040		▼a DLC ▼c DLC ▼d UKM
049	1	▼l 421031498 ▼f 과학 ▼l 421032255 ▼f 과학 ▼l 421032256 ▼f 과학
050	0	▼a TA1673 ▼b .L355 1983
082	0 0	▼a 621.3815/2 ▼2 19
090		▼a 621.38152 ▼b L343
245	0 0	▼a Laser diagnostics and photochemical processing for semiconductor devices : ▼b symposium held November 1982 in Boston, Massachusetts, U.S.A. / ▼c editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
260		▼a New York : ▼b North-Holland, ▼c c1983.
300		▼a xiii, 298 p. : ▼b ill. ; ▼c 24 cm.
440	0	▼a Materials Research Society symposia proceedings ; ▼v v. 17.
500		▼a "Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
504		▼a Includes bibliographical references and indexes.
650	0	▼a Lasers ▼x Industrial applications ▼x Congresses.
650	0	▼a Semiconductors ▼x Congresses.
653		▼a Semiconductor devices ▼a Production ▼a Use of lasers
700	1	▼a Osgood, R. M.
700	1	▼a Brueck, S. R. J.
700	1	▼a Schlossberg, H. R.
710	1	▼a United States. ▼b Air Force. ▼b Office of Scientific Research.

Holdings Information

Science & Engineering Library

No.	Location	Call Number	Accession No.	Availability	Due Date	Make a Reservation	Service
No. 1	Location Science & Engineering Library/Sci-Info(Stacks2)/	Call Number 621.38152 L343	Accession No. 421031498 (4회 대출)	Availability Available	Due Date	Make a Reservation	Service B M
No. 2	Location Science & Engineering Library/Sci-Info(Stacks2)/	Call Number 621.38152 L343	Accession No. 421032255 (1회 대출)	Availability Available	Due Date	Make a Reservation	Service B M
No. 3	Location Science & Engineering Library/Sci-Info(Stacks2)/	Call Number 621.38152 L343	Accession No. 421032256 (3회 대출)	Availability Available	Due Date	Make a Reservation	Service B M