| 000 | 01548camuuu200349 a 4500 | |
| 001 | 000001038582 | |
| 005 | 19990930102003.0 | |
| 008 | 971022s1997 wau b 101 0 eng d | |
| 010 | ▼a 98122098 | |
| 020 | ▼a 0819426563 | |
| 040 | ▼a CU-S ▼c DLC ▼d 244002 | |
| 042 | ▼a lccopycat | |
| 049 | ▼l 151067912 | |
| 050 | 0 4 | ▼a TJ163 ▼b .M4932 1997 |
| 082 | 0 0 | ▼a 621.3815/2 ▼2 21 |
| 090 | ▼a 621.38152 ▼b M626 | |
| 245 | 0 0 | ▼a Micromachined devices and components III : ▼b 29 September 1997, Austin, Texas / ▼c Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology. |
| 246 | 3 | ▼a Micromachined devices and components 3. |
| 246 | 3 | ▼a Micromachined devices and components three. |
| 260 | ▼a Bellingham, Wash., USA : ▼b SPIE, ▼c c1997. | |
| 300 | ▼a ix, 382 p. : ▼b ill. ; ▼c 28 cm. | |
| 490 | 1 | ▼a SPIE proceedings series ; v. 3224. |
| 504 | ▼a Includes bibliographical references and index. | |
| 650 | 0 | ▼a Electromechanical devices ▼x Congresses. |
| 650 | 0 | ▼a Micromechanics ▼x Congresses. |
| 650 | 0 | ▼a Micromachining ▼x Congresses. |
| 700 | 1 | ▼a Chau, Kevin. |
| 700 | 1 | ▼a French, Patrick J. |
| 710 | 2 | ▼a Society of Photo-optical Instrumentation Engineers. |
| 710 | 2 | ▼a Semiconductor Equipment and Materials International. |
| 710 | 2 | ▼a National Institute of Standards and Technology (U.S.). |
| 830 | 0 | ▼a Proceedings of SPIE--the International Society for Optical Engineering ; ▼v v. 3224. |
소장정보
| No. | 소장처 | 청구기호 | 등록번호 | 도서상태 | 반납예정일 | 예약 | 서비스 |
|---|---|---|---|---|---|---|---|
| No. 1 | 소장처 세종학술정보원/과학기술실(5층)/ | 청구기호 621.38152 M626 | 등록번호 151067912 (2회 대출) | 도서상태 대출불가(자료실) | 반납예정일 | 예약 | 서비스 |