| 000 | 01468namuuu200313 a 4500 | |
| 001 | 000001038597 | |
| 005 | 19990930104802.0 | |
| 008 | 990930s1997 wau b 101 0 eng d | |
| 020 | ▼a 0819426555 | |
| 040 | ▼a 244002 ▼c 244002 | |
| 049 | ▼l 151067913 | |
| 082 | 0 0 | ▼a 621.3815/2 ▼2 21 |
| 090 | ▼a 621.38152 ▼b M6263 | |
| 245 | 0 0 | ▼a Micromachining and Microfabrication Process Technology III : ▼b 29-30 September 1997, Austin, Texas / ▼c Shih-Chia Chang, Stella W. Pang chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology. |
| 246 | 3 | ▼a Micromachined devices and components 3. |
| 246 | 3 | ▼a Micromachined devices and components three. |
| 260 | ▼a Bellingham, Wash., USA : ▼b SPIE, ▼c c1997. | |
| 300 | ▼a ix, 310 p. : ▼b ill. ; ▼c 28 cm. | |
| 490 | 1 | ▼a SPIE proceedings series ; v. 3223. |
| 504 | ▼a Includes bibliographical references and index. | |
| 650 | 0 | ▼a Electromechanical devices ▼x Congresses. |
| 650 | 0 | ▼a Micromechanics ▼x Congresses. |
| 650 | 0 | ▼a Micromachining ▼x Congresses. |
| 700 | 1 | ▼a Chang, Shih-Chia. |
| 700 | 1 | ▼a Pang, Stella W. |
| 710 | 4 | ▼a The International Society for Optical Engineering. |
| 710 | 2 | ▼a Semiconductor Equipment and Materials International. |
| 710 | 2 | ▼a National Institute of Standards and Technology. |
| 830 | 0 | ▼a Proceedings of SPIE--the International Society for Optical Engineering ; ▼v v. 3223 |
소장정보
| No. | 소장처 | 청구기호 | 등록번호 | 도서상태 | 반납예정일 | 예약 | 서비스 |
|---|---|---|---|---|---|---|---|
| No. 1 | 소장처 세종학술정보원/과학기술실(5층)/ | 청구기호 621.38152 M6263 | 등록번호 151067913 (2회 대출) | 도서상태 대출불가(자료실) | 반납예정일 | 예약 | 서비스 |