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Advances in low temperature rf plasmas : basis for process design

Advances in low temperature rf plasmas : basis for process design (Loan 1 times)

Material type
단행본
Personal Author
Makabe, T. (Toshiaki)
Title Statement
Advances in low temperature rf plasmas : basis for process design / [edited by] T. Makabe.
Publication, Distribution, etc
New York :   Elsevier,   2002.  
Physical Medium
xii, 341p. 28cm.
ISBN
0444510958
Bibliography, Etc. Note
Includes bibliographical references.
Subject Added Entry-Topical Term
Low temperature plasmas -- Industrial applications.
000 00755namuu2200241 a 4500
001 000001095803
005 20031209141159
008 020514s2002 nyu b 000 0 eng
010 ▼a 2002070662
020 ▼a 0444510958
040 ▼a DLC ▼c DLC ▼d 244002
042 ▼a pcc
049 0 ▼l 151150923
050 0 0 ▼a TA2020 ▼b .A63 2002
082 0 0 ▼a 621.044 ▼2 21
090 ▼a 621.044 ▼b A244
245 0 0 ▼a Advances in low temperature rf plasmas : ▼b basis for process design / ▼c [edited by] T. Makabe.
260 ▼a New York : ▼b Elsevier, ▼c 2002.
300 ▼a xii, 341p. 28cm.
504 ▼a Includes bibliographical references.
650 0 ▼a Low temperature plasmas ▼x Industrial applications.
700 1 ▼a Makabe, T. ▼q (Toshiaki)

Holdings Information

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No. 1 Location Sejong Academic Information Center/Science & Technology/ Call Number 621.044 A244 Accession No. 151150923 (1회 대출) Availability Loan can not(reference room) Due Date Make a Reservation Service M ?

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